Samsung has published a patent describing how several kinds of robots could share one fab floor without stepping on each other.
The filing, titled “Method and System for Controlling Heterogeneous Robots”, was submitted in February 2025 and became public through the Korean register KIPRIS this month. Its subject is a centralized control system that ties different machines into existing factory infrastructure. An autonomous mobile robot could carry a tool or a component while another unit handles inspection or maintenance.
The patent spends much of its detail on coordination, plotting routes, keeping robots from blocking one another and re-sequencing tasks when conditions on the floor change. That is a different problem from moving wafers down a fixed path.
Separate reporting says Samsung has formed a dedicated robot team aimed at chip equipment maintenance. The two strands point the same way. Automated material handling is already standard in memory lines, but maintenance work is not, and it is one of the largest sources of unplanned downtime and cost inside a fab.
Samsung has been building toward what it calls an autonomous semiconductor factory. The patent suggests the company wants its robot fleet orchestrated as one system rather than bought machine by machine.
