Aixtron’s Close Coupled Showerhead (CCS) R&D deposition system will serve as the core tool in a new semiconductor research laboratory at Penn State’s Materials Research Institute, funded by $4.3 million from the US CHIPS Act.
Laboratory scope and funding
The facility, located in the Millennium Science Complex at University Park, is established through infrastructure funding and in-kind support from Penn State’s membership in the Midwest Microelectronics Consortium (MMEC). MMEC operates under the US Department of Defense’s Microelectronics Commons initiative, part of the federal CHIPS Act.
The lab will significantly expand Penn State’s capabilities in next-generation semiconductor thin films and device research. It is designed as a national user platform, offering hands-on training for students and early-career researchers while providing industry-standard process know-how.
Technical capabilities
Aixtron’s CCS system is a highly controlled epitaxial growth platform capable of depositing ultra-high-quality semiconductor layers on substrates up to 100mm in diameter. The installed system is uniquely configured to grow both wide-bandgap gallium nitride (GaN) materials—critical for high-performance power electronics—and two-dimensional (2D) materials, an emerging class of atomically thin semiconductors.
“Combining wide-bandgap and 2D materials capabilities in a single deposition system creates a powerful platform for both academic research and real-world applications—from energy-efficient power devices for electric vehicles to next-generation AI hardware,” said Aixtron CEO Dr. Felix Grawert.
Research and workforce impact
The scalability of the CCS system enables Penn State scientists to transition from fundamental materials research to prototype device fabrication. This accelerates innovation in electric mobility, renewable energy, and high-performance computing.
Professor Joan Redwing, director of Penn State’s 2D Crystal Consortium research facility, emphasized the collaborative model. “This initiative is a model for how academia and industry can work together to strengthen the US innovation ecosystem and supply chain,” she said.
Forward-looking significance
This partnership directly addresses two strategic priorities: advancing domestic semiconductor R&D capability and building a skilled technical workforce. By integrating GaN and 2D materials growth in a single, scalable platform, the lab positions itself at the intersection of mature power electronics and emerging atomic-scale device technologies—a convergence likely to define the next decade of semiconductor innovation.
